Nanofabrication Cleanroom

Elionix ELS F125 Ebeam Lithography System



Evatec Clusterline Sputtering System



3 Lesker PVD 75 Sputtering System



Heidelberg Mask Less Aligner MLA150



Oxford Plasma Pro100 Plasma Enhanced Chemical Vapor Deposition System



Oxford PlasmaPro 100 Cobra Inductive Coupled Plasma Etching System



ACCURA OPTO is a flip-chip bonder