Shared Facilities

ShanghaiTech Quantum Device Lab (SQDL): SQDL is a world-class clean room opened to the public, which aims to develop semiconductor device technologies as well as to perform interdisciplinary researches. We have access to the advanced tools for micro or nano-meter sized device fabrications and characterizations.

(I) Lithography:
• Spin Coater
• Wet Bench
• SUSS MA6 Mask Aligner
• Heidelberg MLA 150 Laser Writer
• Elionix Electron Beam Lithography
(II) Deposition & Etching:
• Inductively Coupled Plasma Etcher HAASRODE-E200A
• Oxford Plasma Enhanced Chemical Vapour Deposition
• Picosun Atomic Layer Deposition
• Kurt J. Lesker Sputter
• Denton Electron Beam Evaporator
(III) Chacterization:
• Leica DM4M Optical Microscopy
• Bruker Dimension Icon Atomic Force Microscopy
• Carl Zeiss Gemini 300 Scanning Electron Microscopy



EE Reserach Platform: It aims to develop novel electromechanical, spintronic, energy devices. We have access to various electrical, optical and magnetic measurement systems in this shared platform as follows:

• Cryogenic Lakeshore Probe Stations
• Cryogenic Oxford Electrical Properties Measurement Systems
• VersaLab Physical Parameter Measurement Systems
• Evico Magnetic Kerr Microscopy